Lectures

Lectures Bachelor:

Mikrosystemtechnik

Language: German | Work effort: 4 SWS lectures | Availability: summer semester

Introduction to Micro Systems Engineering

Language: English | Work effort: 4 SWS lectures | Availability: winter semester

Contents: 
Motivation, broad overview over MEMS working principles (micromechanics, microactuators, microfluidics, microoptics) – how is microengineering different from classical engineering, basics of the clean room environment, silicon, overview of fabrication and characterization technologies.

Prerequisites: 
Physics and chemistry, at high school level (preferably major)

Lectures Master:

Microsystems Processes and Technologies

Language: English | Work effort: 3 SWS lectures | Availability: summer semester

Contents: 
Overview of relevant fabrication processes and characterization technologies for microsystems engineering and microelectronics, including classical clean room processes, back end and rapid prototyping processes.

Prerequisites:
Broad knowledge of physics and, in particular, also chemistry

Micro Mechanics

Language: English | Work effort: 2 SWS lectures + 2 SWS exercises | Availability: winter semester

Contents: 
Basics of continuum mechanics and beam theory; microactuators (electrostatic, magnetic, piezoelectric, thermal, electroactive polymers, shape memory alloys); basics of microfluidics, droplet formation, electrowetting. The aim is to equip students with the techniques needed to develop new working principles.

Prerequisites:
Broad knowledge of physics, basics of geometry and mathematics

Micro Optics

Language: English | Work effort: 2 SWS lectures + 2 SWS exercises | Availability: winter semester

Contents: 
Comprehensive introduction to optics, with a focus on topics relevant for microoptics; optical materials, layer systems; geometric optics, images, aberrations; wave and Fourier optics, various interferometric methods; wave front sensor, spatial light modulators; waveguides, elements of photonic circuits; introduction to photonic crystals.

Prerequisites:
Mathematics. The lectures are relatively mathematical and require profound and reliable knowledge of Fourier transformations and differential equations.

Seminars Master:

Applications of Microsystems in Medical Engineering

Language: English | Work effort: 2 SWS seminar | Availability: summer semester

Seminar on special topics in microsystems applications, specifically for students of Medical Systems Engineering.

Prerequisites:
Completion of at least one microsystems lecture module, preferably two.

Applications of Microsystems Engineering

Language: English | Work effort: 2 SWS seminar | Availability: summer semester

Seminar on special topics in microsystems applications, all other degree programs.

Prerequisites:
Completion of at least one microsystems lecture module, preferably two.